EMLC 2015 - Committees  

Committees 

Members of the International Program Committee of the EMLC 2015

 

Conference Chairs 

Uwe Behringer, UBC Microelectronics, Ammerbuch, Germany
Jo Finders, ASML, Veldhoven, Netherlands

Co-Conference Chairs 

Chris Gale, Applied Materials, Dresden, Germany
Naoya Hayashi, DNP, Saitama, Japan

Program Chairs

Daniel Sarlette, Infineon Technologies GmbH, Dresden, Germany
Brid Connolly, Toppan Photomasks GmbH, Dresden, Germany
Rolf Seltmann, Globalfoundries, Dresden, Germany


Other Members

 

Paul Ackmann, Globalfoundries Inc., Santa Clara, USA
Michael Arnz, Carl Zeiss SMT AG, Oberkochen, Germany  
Carola Blaesing, Carl Zeiss SMS GmbH, Jena, Germany
Parkson Chen, Taiwan Mask Corp., Hsinchu,Taiwan
Natalia Davydova, ASML, Veldhoven, The Netherlands
Dave Farrar, HOYA Corporation, London, UK 
Rik Jonckheere, IMEC, Leuven, Belgium 
Barbara Lauche, Photronics MZD GmbH, Dresden, Germany
Bertrand Le Gratiet, STMicroelectronics, Crolles, Cedex, France
Carlos Lee, EPIC - European Photonics Industery Consortium, Brussels, Belgium
Hans Löschner, IMS Nanofabrication AG, Vienna, Austria
Wilhelm Maurer, Infineon, Munich, Germany
Hiroaki Morimoto, Toppan Printing Co., Ltd., Tokyo, Japan
Jan Hendrik Peters, Carl Zeiss SMS GmbH, Jena, Germany
Emmanuel Rausa, Plasma-Therm USA, St Petersburg, FL, USA
Douglas Resnick, Molecular Imprints Inc., Austin, Texas, USA  
Klaus-Dieter Röth, KLA-Tencor MIE, Weilburg, Germany  
Thomas Scherübl, Carl Zeiss SMS GmbH, Jena, Germany  
Ronald Schnabel, VDE/VDI-GMM, Frankfurt, Germany
Steffen Schulze, Mentor Graphics Corp. Wilsonville, OR, USA  
Ines Stolberg, Vistec Electron Beam GmbH, Jena, Germany   
Jacques Waelpoel, ASML, Veldhoven The Netherlands
John Whittey, KLA-Tencor, San José, USA 
Jim Wiley, ASML US, Inc., Santa Clara, CA, USA
Carlton Willson, University of Texas, Austin, USA
Hermann Wolf, Photronics MZD GmbH, Dresden, Germany  
Stefan Wurm, SEMATECH, Albany , NY, USA
Larry Zurbrick, Agilent Technologies, Santa Clara, CA, USA

 Cooperating Partners

 
 
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