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EMLC 2017 - Committees 

Committees 

The EMLC 2017 International Program Committee

Conference Chairs 

Behringer, Uwe, UBC Microelectronics, Ammerbuch, Germany
Finders, Jo, ASML, Veldhoven, The Netherlands

Co-Conference Chairs 

Connolly, Brid, Toppan Photomasks Inc., Dresden, Germany
Gale, Chris, Applied Materials, Dresden, Germany
Hayashi, Naoya, DNP, Saitama, Japan

Program Chairs

Stolberg, Ines, Vistec Electron Beam, Jena, Germany
Erdmann, Andreas, Fraunhofer IISB, Erlangen, Germany
Pozo, José, European Photonics Industry Consortium, Brussels, Belgium

 

Co-Program-Chairs

Seltmann, Rolf, Globalfoundries, Dresden, Germany
Sarlette, Daniel, Infineon, Dresden, Germany 


Other Members

Blaesing, Carola, Carl Zeiss SMT, Jena, Germany 
Chen, Parkson, Taiwan Mask Corp., Hsinchu,Taiwan
Ehrmann, Albrecht, Carl Zeiss SMT Oberkochen, Germany
Farrar, Dave, HOYA Corporation, London, UK
Jonckheere, Rik, IMEC, Leuven, Belgium
Lauche, Barbara, Photronics MZD GmbH, Dresden, Germany
Le Gratiet, Bertrand, ST Microelectronics, Crolles, France
Lee, Carlos, European Photonics Industry Consortium, Brussels, Belgium
Levinson, Harry, Globalfoundries, Santa Clara, CA, USA
Loeschner, Hans, IMS Nanofabrication AG, Vienna, Austria
Muehlberger, Michael, Profactor GmbH, Steyr-Gleink, Austria
Peters, Jan Hendrik, Carl Zeiss SMT, Jena, Germany
Progler, Chris, Photronics Inc., TX, USA 
Resnick, Douglas J., CNT-Canon, USA 
Roeth, Klaus-Dieter, KLA-Tencor MIE, Weilburg, Germany  
Scheruebl, Thomas, Carl Zeiss SMS GmbH, Jena, Germany  
Schnabel, Ronald, VDE/VDI-GMM, Frankfurt, Germany
Schulze, Steffen, Mentor Graphics Corp. Wilsonville, OR, USA
Tschinkl, Martin, AMTC, Dresden, Germany      
Waelpoel, Jacques, ASML, Veldhoven The Netherlands 
Wiley, Jim, ASML US Inc., Santa Clara, CA, USA
Willson, Grant, University of Texas, Austin, TX, USA 
Wolf, Hermann, Photronics MZD GmbH, Dresden, Germany  
Wurm, Stefan, ATICE LLC, Albany, NY, USA
Zurbrick, Larry, Keysight Technologies, Santa Clara, CA, USA  

 Cooperating Partners

Photomask Japan
 
 
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