The program committee welcomes the submission of abstracts for ICPT 2017. Prospective authors are asked to submit an extended abstract with a minimum of 250 words, written in English, and may include figures.
Abstracts of original work are requested on the following topics:
| FEOL CMP |
|
Emerging technologies in CMP |
| BEOL CMP |
|
CMP consumables |
| Defects, reliability issues and Post CMP cleaning |
|
3D Ics/TSV applications |
| CMP fundamentals, modeling and simulation |
|
Alternative CMP technologies |
| Equipment and metrology |
|
CMP for MEMS |
| Process control |
|
|
Submission Guidelines
Abstracts will be scored according to the originality and significance of the work as well as the quality of the information and data included. Please indicate the preference of oral or poster presentation, and the targeted topic area when submitting the abstract. Submit abstracts online, using the template provided. The deadline for submitting abstracts is April 30, 2017 May 15, 2017. Presentation of accepted papers at the Conference must be in English.
Notice:
1. Please be sure to use the template provided here.
2. Abstract should be submitted online.
Author Notification
All submitted abstracts will be reviewed by peers and the Technical Committee reserves the right to accept or reject papers for inclusion in the program. Notices of acceptance of abstract will be sent out to authors by July 1,2017.
Full Paper Submission
Camera-ready full-length papers, including figures and references (within 6 pages) should be submitted online upon the notice of accepted abstract. Camera-ready papers are due on August 30, 2017.