ICPT 2012

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ICPT 2012 

Call for Papers 

Abstract Submission

The program committee welcomes the submission of abstracts for ICPT 2012. Prospective authors are asked to submit a two-page abstract (one page text, one page figures), written in English. Please assign your paper to the main topics listed and indicate the preference of oral or poster presentation. All papers have to be submitted through the ICPT 2012 website (www.icpt2012.com). The deadline for submission is May 4, 2012.

 

Key Dates

  • Deadline for Abstracts
May 15
  • Acceptance Notification
July 1
  • Full Paper Submission
August 24

 

Main Topics

The conference will be held in English and covers any aspects of planarization and CMP technology. We are encouraging authors to submit papers, which comprise the following topics or areas of interest:
  • ILD/STI CMP
  • Cu/low-k CMP
  • CMP equipment and metrology 
  • CMP process integration and control
  • Post CMP cleaning and defects
  • CMP consumables
  • CMP consumables metrology
  • CMP fundamentals (and defects)
  • Emerging technologies in CMP
  • 3D ICs/TSV applications
  • Green CMP
  • New CMP applications (data storage, LED, glass, PCB, display)

 

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